This book provides a comprehensive description ofmicrosensors for mechanical quantities (flow, pressure,force, inertia) fabricated by silicon micromachining.Since the design of such sensors requiresinterdisciplinary teamwork, the presentation is madeaccessible to engineers trained in electrical andmechanical engineering, physics and chemistry. Thereader is guided through the micromachining fabricationprocess. A chapter on microsensor packaging completesthe discussion of technological problems. Thedescription of the basic physics required for sensordesign includes the mechanics of deformation and thepiezoresistive transduction to electrical signals.There is also a comprehensive discussion of resonantsensors, the hydrodynamics and heat transfer relevantfor flow sensors, and, finally, electronic interfacingand readout circuitry.
目 錄
1.Introduction
2.MEMS
3.Introduction into Silicon Micromachining
4.Mechanics of Membranes and Beams
5.Principles of Measuring Mechanical Quantities
6.Force and Pressure Sensors
7.Acceleration and Angular Rate Sensors
8.Flow sensors
9.Resonant Sensors
10.Electronic Interfacing
11.Packaging
References
Index
