This completely revised edition of a bestsellingconcise introduction to microsystems technologyincludes the latest trends in this emerging scientificdiscipline. The chapters on silicium and LIGAtechnology are greatly expanded, whilst new topicsinclude application aspects in medicine and healthtechnology, lithography and electroplating.
目 錄
Table of Contents:
General Introduction to Microstructure Technology.
The Parallels to Microelectronics.
The Physical and Chemical Basics in Microtechnology.
Basic Technologies in MEMS.
Lithography.
Silicon Microsystem Technology.
The LIGA Process.
Alternative Processes of Microstructuring.
Packaging and Interconnecting Techniques (PIT).
System Technology.
Literatur.
