Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts.
本書特色
適合半導體製程概論課程,但多為選修課。 Critical coverage includes the following:
* Combines process control and semiconductor manufacturing
* Unique treatment of system and software technology and management of overall manufacturing systems
* Chapters include case studies, sample problems, and suggested exercises
* Instructor support includes electronic copies of the figures and an instructor’’s manual
目 錄
Preface.
Acknowledgments.
1. Introduction to Semiconductor Manufacturing.
2. Technology Overview.
3. Process Monitoring.
4. Statistical Fundamentals.
5. Yield Modeling.
6. Statistical Process Control.
7. Statistical Experimental Design.
8. Process Modeling.
9. Advanced Process Control.
10. Process and Equipment Diagnosis.
Appendix A: Some Properties of the Error Function.
Appendix B: Cumulative Standard Normal Distribution.
Appendix C: Percentage Points of the χ2 Distribution.
Appendix D: Percentage Points of the t Distribution.
Appendix E: Percentage Points of the F Distribution.
Appendix F: Factors for Constructing Variables Control Charts.
Index.
